• 360° infinition rotation in 2 axes with gimbal system
• Accuracy: ±5 arcsec to ±40 arcsec
• Max. load: 6.8-16 Kg
• Hollow aperture: 95-206 mm
• Rotation velocity up to 100rpm

• X, Z, T axes
• 360° infinition rotation
• X-axis travel: 155 mm
• Vertical mechanical travel up to 30mm
• Bidirectional repeatability: ±0.5μm (X-axis); ±0.2μm/1mm (Z-axis); ±2 arcsec (T-axis)
• Maglev gravity compensation technology
• Active air/water cooling design
• Rotation velocity up to 150rpm

• X, Y, T axes
• 360° infinition rotation
• X and Y axis travel: 365 mm
• Bidirectional repeatability: ±0.5μm (X, Y axis); ±2 arcsec (T axis)
• Rotation velocity up to 150rpm

• Stacked 4-axis stage with orthogonality design
• Global flatness and straightness up to sub-μm level
• X/Y axis:

High stiffness, high precision guide;

Consistent design of cable disturbing force

• Z-axis:

Magnetic gravity compensation technology in vertical for high positioning accuracy

High stiffness, high precision guide

Vertical incremental encoder for up to 5nm resolution

Ultra-thin, Lightweight design

Vertical mechanical travel up to 30mm

• T-axis:

360° rotation, no tubing wrapping, 12', 8' wafer applicable

Wafer warpage up to 0.7mm

Rotation velocity up to 150rpm

• Integrated 5-axis stage with orthogonality design
• Flatness and straightness up to sub-μm level
• Hybrid application of mechanical guide and air-bearing guide
• X/Y axis: High stiffness, high precision guide; Consistent design of cable disturbing force; High-performance air-bearing guide for excellent dynamic flatness over the entire stroke
• Z-axis: Maglev gravity compensation technology in vertical for high positioning accuracy; High stiffness, high precision guide; Ultra-thin, lightweight and modularization design; Vertical mechanical travel up to 30mm
• T-axis: 360° rotation, no tubing wrapping; 12, 8, 6' wafer applicable; Rotation velocity up to 150rpm

• Stacked 3-axis stage with orthogonality design
• Global flatness and straightness up to sub- μm level
• X/Y axis: High stiffness, high precision guide; Consistent design of cable disturbing force
• Z-axis: Magnetic gravity compensation technology in vertical for high positioning accuracy; High stiffness, high precision guide; Vertical incremental encoder for up to 5nm resolution; Ultra-thin, lightweight design; Vertical mechanical travel up to 30mm

• ±0.1° Tip/Tilt precision adjustment
• High precision infinition rotation
• Constant stiffness maglev gravity compensation technology
• High positioning accuracy,excellent motion control capability, and outstanding stability